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Technology of the modeling of the processes of ion implantation and thermo treatment to form fine and extra-fine doped layers of hardware components of submicron electronics or Modeling of ion implantation processes BEAM2HD

The software package is intended for use in the system of end-to-end simulation of the designing and manufacturing of submicron microelectronics products with design rules equal to 0.35-0.18 microns or less.

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