X-ray microscope with a multi-element refractive X-ray lens


The X-ray microscope is designed for radiography of microelectronics, micromechanics and biological objects.


The distinctive feature of the proposed microscope is the use of a multi-element refractive X-ray lens. This X-ray lens is composed of a large number of biconcave microlenses and which allows one to form an image of the object, just like a lens for visible image. Thus, a serial X-ray tube (e.g. the one for structural analysis) can be used instead of expensive microfocus X-ray tubes as a source of radiation. The optical parameters of the X-ray lens, which is used in the microscope, were determined in nine synchrotrons in the USA, Japan, Germany, France, Russia, the Republic of Korea and China.

Structure of the X-ray microscope includes:
  1. X-ray tube with a copper anode;
  2. Refractive X-ray lens;
  3. X-ray camera for recording of the object’s images;
  4. Goniometer;
  5. Holder (to fasten the object of study);
  6. Radiation source.
Principle of operation of the device:
X-rays from the X-ray tube pass through the object, experiencing dispersion and absorption. From each point of the object plane the dispersed rays are focused by the lens to the corresponding point of the image plane with an X-ray camera, and thus generate an image of the object.
The microscope spatial resolution for photons with an energy of 8 keV is equal to 2-3 μm, the field of view is about 1000 μm. Foreign analogues (Bruker and Rigaku) produce X-ray microscopes with a resolution of less than 1 μm. Moreover, the cost of the device is significantly lower.

R&D protection:
• Utility model patent №8602 for “Device for obtaining of a monochromatic X-ray microbeam;
• Utility model patent №8963 for “Multi-element refractive lens for gamma-ray emission.

  • X-ray optics;
  • Microscopy;
  • Medicine;
  • Microelectronics and micromechanics.

Commercial offer
  • Sale of technology